Process diagnostics through measurement of neutral molecules in low-temperature plasmas.
نویسندگان
چکیده
منابع مشابه
Low-order modes as diagnostics of spheroidal non-neutral plasmas.
Many experiments requiring the confinement of charged particles have been performed in Penning traps. High-precision measurements of magnetic moments of fundamental particles [1) have been made, and atomic spectroscopy in an isolated trap environment is of potential use for the next generation of atomic clocks [2]. Similar traps are employed in ion cyclotron mass spectrometry [3], and for exper...
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ژورنال
عنوان ژورنال: SHINKU
سال: 1988
ISSN: 0559-8516,1880-9413
DOI: 10.3131/jvsj.31.208